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ImpressumCCN Ost, Raum Istanbul
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Plenary Talk (Raum St. Petersburg) |
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Chair: |
R. Werthschützky, Technical University Darmstadt (Germany) |
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Co-Chair: |
R. Lerch, University Erlangen-Nürnberg, Erlangen (Germany) |
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ÜV2 |
09:00 |
Go with the Flow – Trends and Innovations in Flow Measurement W. Drahm, Endress+Hauser GmbH+Co. KG, Freising (Germany) |
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09:45 |
Coffee Break |
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C1: MEMS I |
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Chair: |
M. J. Vellekoop, Technical University Wien (Austria) |
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Co-Chair: |
J. Müller, Technical University Hamburg-Harburg (Germany) |
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C1.1 |
10:00 |
A MEMS Mass Spectrometer for Portable Applications E. Wapelhorst, J.-P. Hauschild, J. Müller, Technical University Hamburg-Harburg (Germany) |
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C1.2 |
10:20 |
An Indoor Positioning System Based on MEMS Inertial Sensor Technology G. Glanzer, Technical University Graz (Austria) |
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C1.3 |
10:40 |
Thermopile Linear Array Sensors and Modules with Short Time Constant and High Sensitivity M. Simon, W. Leneke, J. Schieferdecker, M. Schulze, K. Storck, F. Völklein, Heimann Sensor GmbH, Dresden (Germany) |
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C1.4 |
11:00 |
High Temperature Silicon-on-Insulator Based Hotplates: Long Term Performance of Platinum Heater Materials A. Krenkow, I. Käpplinger, W. Brode, G. Müller, EADS Deutschland GmbH, München (Germany) |
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11:20 |
Lunch Break |
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13:30 –15:00 |
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C2: MEMS II |
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Chair: |
H. Yamasaki, Corporate Research and Development Headquarters YOKOGAWA Electric Corporation, Tokyo (Japan) |
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Co-Chair: |
W. Lang, University Bremen, IMSAS (Germany) |
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C2.1 |
15:00 |
Low Cost PCR Microsystem G. Hairer, D. Graschopf, M.H. Mansfeld, C. Nöhammer, M.J. Vellekoop, Technical University Wien (Austria) |
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C2.2 |
15:20 |
New Integration Technologies and Applications for Miniaturised Thermoelectric Flow Sensors R. Buchner, C. Sosna, W. Benecke, W. Lang, University Bremen (Germany) |
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C2.3 |
15:40 |
Rapid Process of Development for Automotive Micromachined Accelerometers T. Link, J. Dehnert, D. Mintenbeck, Y. Manoli, Hahn-Schickard-Gesellschaft e.V., Villingen-Schwenningen (Germany) |
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C2.4 |
16:00 |
Capacitive Dew Point Microsensor W. Missal, M. Panitz, W. Benecke, W. Lang, University Bremen (Germany) |
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C2.5 |
16:20 |
MEMS-Based Infrared Emitters Based on Nanoamorphous Carbon J. Kunsch, T. S. Skotheim, P. Ohlckers, G. G. Kirpilenko, V. K. Dmitriev, Laser Components GmbH, Olching (Germany) |
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16:40 |
End |
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